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1

[IEEE 2017 22nd Microoptics Conference (MOC) - Tokyo (2017.11.19-2017.11.22)] 2017 22nd Microoptics Conference (MOC) - MEMS based micromirror arrays

Hillmer, Hartmut, Tatzel, Andreas, Al-Qargholi, Basim, Khan, Muhammad Mohsin, Akhundzada, Sapida

Année:

2017

Langue:

english

Fichier:

PDF, 769 KB

english, 2017

2

Design of self-assembling micromirror arrays for light guiding applications

Qingdang Li, Andreas Jäkel, Volker Viereck, Hartmut Hillmer

Journal:

Microsystem Technologies

Année:

2010

Langue:

english

Fichier:

PDF, 356 KB

english, 2010

3

Surface roughness analysis of SiO2for PECVD, PVD and IBD on different substrates

Amirzada, Muhammad Rizwan, Tatzel, Andreas, Viereck, Volker, Hillmer, Hartmut

Journal:

Applied Nanoscience

Année:

2016

Langue:

english

Fichier:

PDF, 852 KB

english, 2016

4

Facet influence on wavelength tunability and linewidth chirp in InGaAs/InAlGaAs quantum-well distributed feedback lasers under high-bit-rate modulation

Hillmer, Hartmut

Journal:

Optical Engineering

Année:

1995

Langue:

english

Fichier:

PDF, 302 KB

english, 1995

5

Investigation of Relative Intensity Noise in Asymmetric External Cavity Semiconductor Laser Sensors: Influence of Dual-Line Spectral Separation and Linewidth Enhancement Factor

Shrestha, Jyoti C., Blom, Sven, Witzigmann, Bernd, Hillmer, Hartmut H.

Journal:

IEEE Sensors Journal

Année:

2015

Langue:

english

Fichier:

PDF, 898 KB

english, 2015

6

[IEEE 2015 International Conference on Optical MEMS and Nanophotonics (OMN) - Jerusalem (2015.8.2-2015.8.5)] 2015 International Conference on Optical MEMS and Nanophotonics (OMN) - Narrowband chirped thin film filters with distributed cavity

Kusserow, Thomas, Taimoor, Muhammad, Reuter, Sabrina, Hillmer, Hartmut

Année:

2015

Langue:

english

Fichier:

PDF, 437 KB

english, 2015

7

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing - Using scanning probe microscopy and nanomoter surface profiler of DEKTAK for determination of thermal stress in quasi-monolithic integration technology (QMIT)

Joodaki, Mojtaba, Senyildiz, Teoman, Kompa, Guenter, Kassing, Rainer, Hillmer, Hartmut, Knystautas, Emile J., Kirk, Wiley P., Browning, Valerie

Année:

2001

Langue:

english

Fichier:

PDF, 959 KB

english, 2001

8

Single-step inductively coupled plasma etching of sputtered Nb 2 O 5 /SiO 2 multilayer stacks using chromium etch mask

Taimoor, Muhammad, Alatawi, Abdullah, Reuter, Sabrina, Hillmer, Hartmut, Kusserow, Thomas

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2017

Langue:

english

Fichier:

PDF, 972 KB

english, 2017

9

Multifunctional guest–host particles engineered by reversal nanoimprint lithography

Ha, Uh-Myong, Kaban, Burhan, Tomita, Andreea, Krekić, Kristijan, Klintuch, Dieter, Pietschnig, Rudolf, Ehresmann, Arno, Holzinger, Dennis, Hillmer, Hartmut

Journal:

Applied Nanoscience

Année:

2018

Langue:

english

Fichier:

PDF, 2.12 MB

english, 2018

10

[IEEE 2019 International Conference on Optical MEMS and Nanophotonics (OMN) - Daejeon, Korea (South) (2019.7.28-2019.8.1)] 2019 International Conference on Optical MEMS and Nanophotonics (OMN) - Optical MEMS based micromirror arrays: fabrication,characterization and potential applications in smart active windows

Hillmer, Hartmut, Al-Qargholi, Basim, Khan, Muhammad Mohsin, Iskhandar, Mustaqim Siddi Que, Wilke, Hans, Tatzel, Andreas

Année:

2019

Fichier:

PDF, 1.07 MB

2019

11

[IEEE 2019 International Conference on Optical MEMS and Nanophotonics (OMN) - Daejeon, Korea (South) (2019.7.28-2019.8.1)] 2019 International Conference on Optical MEMS and Nanophotonics (OMN) - Design, Fabrication and Characterization of Subfield Addressing in Micromirror Arrays for Smart Window Applications

Iskhandar, Mustaqim Siddi Que, Luo, Huanping, Ekaputera, Krishna Ananda, Al-Qargholi, Basim, Khan, Muhammad Mohsin, Hillmer, Hartmut

Année:

2019

Fichier:

PDF, 7.28 MB

2019

12

Die vielen Väter des Transistors. Meilensteine in der Geschichte des Festkörperverstärkers

Hartmut Hillmer

Journal:

Physik in unserer Zeit

Année:

2008

Langue:

german

Fichier:

PDF, 593 KB

german, 2008

13

Frequency domain analysis of modes in a photonic crystal micro-opto-electro-mechanical system with periodically arranged circular holes

Akcakoca, Ugur, Witzigmann, Bernd, Zamora, Ricardo, Kusserow, Thomas, Hillmer, Hartmut

Journal:

Optical and Quantum Electronics

Année:

2012

Langue:

english

Fichier:

PDF, 370 KB

english, 2012

14

Terahertz beam focusing based on plasmonic waveguide scattering

Monnai, Yasuaki, Altmann, Kristian, Jansen, Christian, Koch, Martin, Hillmer, Hartmut, Shinoda, Hiroyuki

Journal:

Applied Physics Letters

Année:

2012

Langue:

english

Fichier:

PDF, 1.43 MB

english, 2012

15

Processing of photonic crystals in InP membranes by focused ion beam milling and plasma etching

Thomas Kusserow, Matthias Wulf, Ricardo Zamora, Kelash Kanwar, Hartmut Hillmer

Journal:

Microelectronic Engineering

Année:

2013

Langue:

english

Fichier:

PDF, 695 KB

english, 2013

16

[IEEE 2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz 2012) - Wollongong, NSW, Australia (2012.09.23-2012.09.28)] 2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves - THz beam steering based on plasmonic waveguide scattering with tunable gratings

Monnai, Yasuaki, Altmann, Kristian, Koch, Martin, Hillmer, Hartmut, Shinoda, Hiroyuki

Année:

2012

Langue:

english

Fichier:

PDF, 576 KB

english, 2012

17

High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers

Wang, Xiaolin, Albrecht, Alla, Mai, Hanh H., Woidt, Carsten, Meinl, Tamara, Hornung, Michael, Bartels, Martin, Hillmer, Hartmut

Journal:

Microelectronic Engineering

Année:

2013

Langue:

english

Fichier:

PDF, 1.77 MB

english, 2013

18

Obituary.

Schmidt, Christoph, Smolarczyk, Marek, Gomer, Ludmilla, Hillmer, Hartmut, Ehresmann, Arno

Journal:

Année:

1925

Langue:

english

Fichier:

PDF, 200 KB

english, 1925

19

Artificial sub-μm magnetic patterning by He+ ion bombardment through a mask fabricated by Ultraviolet NanoImprint Lithography (UV-NIL)

Schmidt, Christoph, Smolarczyk, Marek, Gomer, Ludmilla, Hillmer, Hartmut, Ehresmann, Arno

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Année:

2014

Langue:

english

Fichier:

PDF, 1.31 MB

english, 2014

20

Deep single step vertical ICP–RIE etching of ion beam sputter deposited SiO2/Si multilayer stacks

Messow, Ferdinand, Welch, Colin, Eifert, Alexander, Ang, Wei Chung, Hoe, Nee Shiuan, Kusserow, Thomas, Hillmer, Hartmut

Journal:

Microelectronic Engineering

Année:

2014

Langue:

english

Fichier:

PDF, 565 KB

english, 2014

21

[IEEE 2010 10th International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) - Atlanta, GA, USA (2010.09.6-2010.09.9)] Numerical Simulation of Optoelectronic Devices - Electromagnetic analysis of polarization and frequency selective tunable optical MEMS

Akcakoca, Ugur, Marklein, Rene, Witzigmann, Bernd, Hillmer, Hartmut

Année:

2010

Langue:

english

Fichier:

PDF, 557 KB

english, 2010

22

[IEEE 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics - Freiburg, Germany (2008.08.11-2008.08.14)] 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics - Monolithic integration of a tunable photodetector based on InP/air-gap Fabry-Pérot filters

Kusserow, Thomas, Zamora, Ricardo, Sonksen, Julian, Dharmarasu, Nethaji, Hillmer, Hartmut, Nakamura, Tetsuji, Hayakawa, Tetsuo, Vengatesan, Balasubramanian

Année:

2008

Langue:

english

Fichier:

PDF, 1001 KB

english, 2008

23

[IEEE 2012 Ninth International Conference on Networked Sensing Systems (INSS) - Antwerp, Belgium (2012.06.11-2012.06.14)] 2012 Ninth International Conference on Networked Sensing (INSS) - Terahertz beam steering using structured MEMS surfaces for networked wireless sensing

Monnai, Yasuaki, Viereck, Volker, Hillmer, Hartmut, Altmann, Kristian, Jansen, Christian, Koch, Martin, Shinoda, Hiroyuki

Année:

2012

Langue:

english

Fichier:

PDF, 388 KB

english, 2012

24

Optical amplification and photodegradation in films of spiro-quaterphenyl and its derivatives

Abdel-Awwad, Mohamed, Luan, Haitao, Messow, Ferdinand, Kusserow, Thomas, Wiske, Antje, Siebert, Achim, Fuhrmann-Lieker, Thomas, Salbeck, Josef, Hillmer, Hartmut

Journal:

Journal of Luminescence

Année:

2015

Langue:

english

Fichier:

PDF, 1.22 MB

english, 2015

25

[IEEE 2012 IEEE Photonics Society International Conference on Optical MEMS and Nanophotonics - Banff, AB, Canada (2012.08.6-2012.08.9)] 2012 International Conference on Optical MEMS and Nanophotonics - Guided-mode resonances in dielectric photonic crystal slabs with low index contrast

Kusserow, Thomas, Khan, Yousuf, Zamora, Ricardo, Messow, Ferdinand, Hillmer, Hartmut

Année:

2012

Langue:

english

Fichier:

PDF, 579 KB

english, 2012

26

[IEEE 2010 Seventh International Conference on Networked Sensing Systems (INSS) - Kassel, Germany (2010.06.15-2010.06.18)] 2010 Seventh International Conference on Networked Sensing Systems (INSS) - High-resolution, low-cost microsensors for networked sensing systems: Optical nanospectrometers with nanoimprinted cavities of filter arrays

Wang, Xiaolin, Albrecht, Alla, Schudy, Sabrina, Woit, Tatjana, Daneker, Vadim, Schultz, Karin, Mai, Hanh Hong, Kohler, Florestan, Wittzack, Stefan, Bartels, Martin, Hillmer, Hartmut

Année:

2010

Langue:

english

Fichier:

PDF, 700 KB

english, 2010

27

[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Technological requirements for a self-aligned lateral SiGe HBT with the SiGe layer formed by Ge ion implantation in Si including theoretical performance

Joodaki, Mojtaba, Hillmer, Hartmut

Année:

2006

Langue:

english

Fichier:

PDF, 94 KB

english, 2006

28

[IEEE 2011 11th International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) - Rome, Italy (2011.09.5-2011.09.8)] 2011 Numerical Simulation of Optoelectronic Devices - Design and analysis of polarization selective tunable photonic crystal filters

Akcakoca, Ugur, Witzigmann, Bernd, Zamora, Ricardo, Kusserow, Thomas, Hillmer, Hartmut

Année:

2011

Langue:

english

Fichier:

PDF, 355 KB

english, 2011

29

Photonic Materials for Optical Communications

Hillmer, Hartmut, Germann, Roland

Journal:

Année:

2003

Langue:

english

Fichier:

PDF, 244 KB

english, 2003

30

[IEEE 2014 International Conference on Optical MEMS and Nanophotonics (OMN) - Glasgow, UK (2014.8.17-2014.8.21)] 2014 International Conference on Optical MEMS and Nanophotonics - Modelling, design and fabrication of dielectric photonic crystal structures using temporally asymmetric shaped femtosecond laser pulses

Khan, Yousuf, Gotte, Nadine, Meinl, Tamara, Kusserow, Thomas, Senftleben, Arne, Baumert, Thomas, Hillmer, Hartmut

Année:

2014

Langue:

english

Fichier:

PDF, 247 KB

english, 2014

31

Stress relaxation in dual ion beam sputtered Nb 2 O 5 and SiO 2 thin films: application in a Fabry–Pérot filter array with 3D nanoimprinted cavities

Ullah, Anayat, Wilke, Hans, Memon, Imran, Shen, Yannan, Nguyen, Duc Toan, Woidt, Carsten, Hillmer, Hartmut

Journal:

Journal of Micromechanics and Microengineering

Année:

2015

Langue:

english

Fichier:

PDF, 1.05 MB

english, 2015

32

Terahertz beam steering and variable focusing using programmable diffraction gratings

Monnai, Yasuaki, Altmann, Kristian, Jansen, Christian, Hillmer, Hartmut, Koch, Martin, Shinoda, Hiroyuki

Journal:

Année:

2013

Langue:

english

Fichier:

PDF, 1.47 MB

english, 2013

33

Quasi-monolithic integration of high-power GaN-based HEMTs for high-frequency applications

Kricke, Alexander, Joodaki, Mojtaba, Dharmarasu, Nethaji, Kompa, Guenter, Hillmer, Hartmut

Journal:

Semiconductor Science and Technology

Année:

2007

Langue:

english

Fichier:

PDF, 322 KB

english, 2007

34

Residual-layer-free 3D nanoimprint using hybrid soft templates

Kolli, VijayRamya, Woidt, Carsten, Hillmer, Hartmut

Journal:

Microelectronic Engineering

Année:

2016

Langue:

english

Fichier:

PDF, 1.44 MB

english, 2016

35

SPIE Proceedings [SPIE SPIE Europe Microtechnologies for the New Millennium - Dresden, Germany (Monday 4 May 2009)] Smart Sensors, Actuators, and MEMS IV - Design and fabrication of self-assembling micromirror arrays

Li, Qingdang, Schmid, Ulrich, Jäkel, Andreas, Viereck, Volker, Schmid, Jürgen, Hillmer, Hartmut

Année:

2009

Langue:

english

Fichier:

PDF, 2.35 MB

english, 2009

36

Narrowband optical thin-film filters with distributed cavity modes

Taimoor, Muhammad, Reuter, Sabrina, Hillmer, Hartmut, Kusserow, Thomas

Journal:

Applied Physics A: Materials Science & Processing

Année:

2016

Langue:

english

Fichier:

PDF, 1.20 MB

english, 2016

37

Letters to the Editor

Hillmer, Hartmut H.

Journal:

Année:

2003

Langue:

english

Fichier:

PDF, 94 KB

english, 2003

38

Highly uniform residual layers for arrays of 3D nanoimprinted cavities in Fabry–Pérot-filter-array-based nanospectrometers

Memon, Imran, Shen, Yannan, Khan, Abdullah, Woidt, Carsten, Hillmer, Hartmut

Journal:

Applied Nanoscience

Année:

2016

Langue:

english

Fichier:

PDF, 1.88 MB

english, 2016

39

3D nanoimprint for NIR Fabry-Pérot filter arrays: fabrication, characterization and comparison of different cavity designs

Nguyen, Duc Toan, Ababtain, Muath, Memon, Imran, Ullah, Anayat, Istock, André, Woidt, Carsten, Xie, Weichang, Lehmann, Peter, Hillmer, Hartmut

Journal:

Applied Nanoscience

Année:

2016

Langue:

english

Fichier:

PDF, 1.42 MB

english, 2016

40

SPIE Proceedings [SPIE Fifth International Conference on Industrial Laser and Laser Applications '95 - Shatura, Moscow, Russia (Saturday 24 June 1995)] Fifth International Conference on Industrial Lasers and Laser Applications '95 - Chirped DFB gratings using bent waveguides to tailor specific laser properties

Hillmer, Hartmut, Panchenko, Vladislav Y., Golubev, Vladimir S.

Année:

1996

Langue:

english

Fichier:

PDF, 1.16 MB

english, 1996

41

SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA (Wednesday 1 February 1995)] Laser Diodes and Applications - Application of DFB lasers with individually chirped gratings

Hillmer, Hartmut, Hansmann, Stefan, Burkhard, Herbert, Grabmaier, A., Kuphal, E., Linden, Kurt J., Akkapeddi, Prasad R.

Année:

1995

Langue:

english

Fichier:

PDF, 566 KB

english, 1995

42

SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA (Wednesday 1 February 1995)] Physics and Simulation of Optoelectronic Devices III - Effects of injected light and optical feedback on directly modulated MQW lasers and OTDM multigigabit-per-second system performance

Burkhard, Herbert, Mohrdiek, S., Schoell, H., Hillmer, Hartmut, Hansmann, Stefan, Mattheus, A., Osinski, Marek, Chow, Weng W.

Année:

1995

Langue:

english

Fichier:

PDF, 1.00 MB

english, 1995

43

SPIE Proceedings [SPIE OE/LASE'93: Optics, Electro-Optics, & Laser Applications in Science& Engineering - Los Angeles, CA (Sunday 17 January 1993)] Laser Diode Technology and Applications V - Large-wavelength tunability of asymmetric three-section DFB lasers under cw and pulsed bias

Hillmer, Hartmut, Zhu, H. L., Burkhard, Herbert, Renner, Daniel

Année:

1993

Langue:

english

Fichier:

PDF, 368 KB

english, 1993

44

SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Semiconductor Lasers and Laser Dynamics III - RIN spectra of a two-mode lasing two-section DFB laser for optical sensor application

Krause, Hubert, Panajotov, Krassimir P., Sciamanna, Marc, Sonksen, Julian H., Baumann, Jürgen, Valle, Angel A., Michalzik, Rainer, Troppenz, Ute, Rehbein, Wolfgang, Viereck, Volker, Hillmer, Hartmut H

Année:

2008

Langue:

english

Fichier:

PDF, 186 KB

english, 2008

45

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] MOEMS and Miniaturized Systems III - Bionics: prcise color tuning by interference in nature and technology-applications in surface-micromachined 1.55μm vertical air-cavity filters

Hillmer, Hartmut, Daleiden, Juergen, Prott, Cornelia, Irmer, Soeren, Roemer, Friedhard, Ataro, Edwin, Tarraf, Amer, Ruehling, H., Maniak, Markus, Strassner, Martin, Smith, James H.

Année:

2003

Langue:

english

Fichier:

PDF, 1.27 MB

english, 2003

46

SPIE Proceedings [SPIE Photonics West '96 - San Jose, CA (Saturday 27 January 1996)] Physics and Simulation of Optoelectronic Devices IV - Carrier and photon dynamics in transversally asymmetric high-speed AlGaAs/InP MQW lasers

Hillmer, Hartmut, Greiner, A., Steinhagen, F., Burkhard, Herbert, Loesch, R., Schlapp, Winfried, Kuhn, Thomas, Chow, Weng W., Osinski, Marek

Année:

1996

Langue:

english

Fichier:

PDF, 1.46 MB

english, 1996

47

SPIE Proceedings [SPIE Integrated Optoelectronics '94 - Lindau, Federal Republic of Germany (Sunday 10 April 1994)] Linear and Nonlinear Integrated Optics - Facet influence on wavelength tunability and linewidth-chirp under high bit rate modulation in InGaAs/InAlGaAs quantum well (QW) DFB lasers

Hillmer, Hartmut, Hansmann, Stefan, Burkhard, Herbert, Walter, Herbert J., Janning, H., Goebel, R., Righini, Giancarlo C., Yevick, David

Année:

1994

Langue:

english

Fichier:

PDF, 380 KB

english, 1994

48

SPIE Proceedings [SPIE Integrated Optoelectronics Devices - San Jose, CA (Saturday 25 January 2003)] Vertical-Cavity Surface-Emitting Lasers VII - 142-nm electrostatically actauted tuning using surface-micromachined vertical air-cavity wavelength-selective elements for applications in 1.55μm VCSELs

Hillmer, Hartmut, Prott, Cornelia, Daleiden, Jurgen, Romer, Friedhard, Irmer, Soeren, Ataro, Edwin, Strassner, Martin, Lei, Chun, Kilcoyne, Sean P.

Année:

2003

Langue:

english

Fichier:

PDF, 938 KB

english, 2003

49

SPIE Proceedings [SPIE Photonics Fabrication Europe - Brugge, Belgium (Monday 28 October 2002)] MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly - Continuously tunable InP-based multiple air-gap MOEMS filters with ultrawide tuning range

Irmer, Soeren, Daleiden, Juergen, Rangelov, Ventzeslav, Prott, Cornelia, Roemer, Friedhard, Strassner, Martin, Tarraf, Amer, Hillmer, Hartmut, Behringer, Uwe F. W., Courtois, Bernard, Khounsary, Ali M

Année:

2003

Langue:

english

Fichier:

PDF, 734 KB

english, 2003

50

SPIE Proceedings [SPIE Photonics Fabrication Europe - Brugge, Belgium (Monday 28 October 2002)] Laser Diodes, Optoelectronic Devices, and Heterogenous Integration - Potential of micromachined photonics: miniaturization, scaling, and applications in continuously tunable vertical air-cavity filters

Hillmer, Hartmut, Daleiden, Juergen, Irmer, Soeren, Roemer, Friedhard, Prott, Cornelia, Tarraf, Amer, Strassner, Martin, Ataro, Edwin, Scholz, Thorsten, Driessen, Alfred, Baets, Roel G., McInerney, Jo

Année:

2003

Langue:

english

Fichier:

PDF, 878 KB

english, 2003